在CMOS平台上大规模制造具有圆极化的元轴子
Gyu-Won Han1,2, Jaewon Jang1,3, Minsu Park1,3
1Department of Physics, Chungnam National University, Daejeon, South Korea.
Nanophotonics (Berlin, Germany)
|December 16, 2024
概括
大面积的元轴子是使用补充金属氧化物半导体 (CMOS) 技术批量生产的. 这些先进的光学元件产生贝塞尔束,为紧和经济高效的光学系统铺平了道路.
科学领域:
- 光学和光子学 在光学和光子学.
- 材料科学 材料科学 材料科学
- 半导体制造业 半导体制造业
背景情况:
- 超表面提供了小型化和多功能性,取代了重的光学组件.
- 互补的金属氧化物半导体 (CMOS) 工艺使晶圆规模生产成为可能,这对于工业采用至关重要.
- 将超表面制造与CMOS平台的整合加快了它们的应用.
研究的目的:
- 为了证明大面积元轴子的晶圆规模大规模生产.
- 设计能够同时进行相位和极化调制的元轴子.
- 探索基于CMOS的超表面生产对先进光学应用的潜力.
主要方法:
- 在8英寸晶圆上制造2毫米直径的元轴子,采用深紫外线 (DUV) 光刻法.
- 基于Pancharatnam-Berry (PB) 阶段的元轴子设计,用于量身定制的光操纵.
- 生成的贝塞尔束属性的表征,包括偏振和焦点深度.
主要成果:
- 在CMOS平台上成功批量生产大面积元轴子.
- 由元轴子对同步相位和极化调制的演示.
- 产生一个循环极化贝塞尔束,其焦点深度在980nm时大约为2.3mm.
结论:
- 晶圆尺度CMOS生产是可行的先进的超表面设备,如meta-axicons.
- 制造的元轴子显示出在光通信,激光处理和光学捕获等领域的应用的前景.
- 这种方法显著提升了超表面技术的工业可行性.
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