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一个基于电热Al-SiO双形体的微型抓手.

Hengzhang Yang1,2, Yao Lu1,2,3, Yingtao Ding1,2

  • 1School of Integrated Circuits and Electronics, Beijing Institute of Technology, Beijing, China.

Microsystems & nanoengineering
|December 16, 2024
PubMed
概括

这项研究介绍了一种使用Al-SiO2双形体进行精确微组装的电热微. 它表现出强大的抓取能力和快速响应,用于电子产品中微型对象操纵.

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科学领域:

  • 材料科学与工程 材料科学与工程
  • 微型和纳米工程 微型和纳米工程
  • 机器人和自动化机器人与自动化

背景情况:

  • 在微电子和生物医学工程等领域,微型和纳米尺度操纵中,微型抓手至关重要.
  • 现有的微型抓手需要高精度,快速响应,可靠性和低功耗来处理微妙的物体.

研究的目的:

  • 开发和描述一个用Al-SiO2双形体的电热驱动微型抓手.
  • 在可变形性,响应时间和抓握强度方面评估微型抓握器的性能.

主要方法:

  • 使用Al-SiO2双形体制造一个微型抓手,利用残余应力来实现自然封闭的状态.
  • 采用温度控制来通过热膨胀不匹配来在开放和关闭状态之间激活微型抓手.
  • 使用聚甲基甲酸盐 (PMMA) 微珠和珠用于处理和取置任务的实验验证.

主要成果:

  • 微型抓手在5V下实现100多度的曲,响应时间低于10ms.
  • 证明了 400μm PMMA 微珠的安全抓取,在振动时承受 35g,在冲击测试中承受 1600g 以上.
  • 在感应芯片上成功完成了400μm珠的选择和放置任务.

结论:

  • 开发的电热微型抓手提供了卓越的精度,快速响应和强大的抓取能力.
  • 它的性能使其非常适合微组装和微处理,特别是在电子包装应用中.