在无接触微芯片转移的激光诱导前向转移中囊泡执行的动力学
DoYoung Kim1, Seong Ryu1, Sukang Bae2,3
1School of Material Science and Engineering, Pusan National University, Busan 46241, Republic of Korea.
Nanomaterials (Basel, Switzerland)
|December 17, 2024
概括
这项研究优化了激光诱导前传 (LIFT) 精确的微芯片传输,达到97%的收益率. 这种无接触方法对于微型发光二极管 (μ-LED) 制造至关重要.
科学领域:
- 材料科学 材料科学 材料科学
- 微电子工程 微电子工程
- 激光物理 激光物理
背景情况:
- 微电子和显示器的进步需要精确,高速的微芯片传输.
- 可扩展的无接触方法对于制造越来越复杂和微型化的设备至关重要.
- 激光诱导向前转移 (LIFT) 为微尺度放置提供了一个有前途的解决方案,特别是在微型发光二极管 (μ-LED) 中.
研究的目的:
- 为了优化激光诱导向前转移 (LIFT) 过程,以精确转移微芯片.
- 调查影响受控泡形成和LIFT中的物质转移的关键参数.
- 为了证明LIFT在微型LED制造和半导体生产中的有效性.
主要方法:
- 系统调整激光能量密度,脉冲宽度和动态释放层 (DRL) 厚度.
- 使用基于聚胺的光反应性DRL,在355nm激光照射下分解.
- 采用3D形状测量,X射线光电子光谱和超快速成像来分析DRL破裂动态和微芯片速度.
主要成果:
- 通过参数优化实现了受控的泡形成.
- 一个DRL厚度为1μm和传输速度为20 m s−1被确定为最佳.
- 成功证明了高达97%的转移收益率.
结论:
- 优化的LIFT参数可以实现高度精确和高效的无接触微芯片传输.
- 开发的LIFT工艺适合于μ-LED制造的苛刻要求.
- 这种技术在推进半导体生产方面具有重大潜力.
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