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相关实验视频

Updated: Jun 4, 2025

Synthesis and Characterization of High c-axis ZnO Thin Film by Plasma Enhanced Chemical Vapor Deposition System and its UV Photodetector Application

Synthesis and Characterization of High c-axis ZnO Thin Film by Plasma Enhanced Chemical Vapor Deposition System and its UV Photodetector Application

Published on: October 3, 2015

基于ZnO的纳米粒子组成的光敏薄膜.

Tina Dilova¹, Anna Dikovska², Aleksandra Baeva¹

¹Institute of General and Inorganic Chemistry, Bulgarian Academy of Sciences, Acad. G. Bonchev Str., bl.11, 1113 Sofia, Bulgaria.

Materials (Basel, Switzerland)

|December 17, 2024

概括

大气脉冲激光沉积为光敏感元素创造了多孔的ZnO和ZnO-TiO2纳米结构. 纳米秒沉积产生的光电流明显高于皮秒沉积由于更好的吸收和更少的重组.

关键词:

在露天的PLD.复合材料复合材料是一种复合材料.纳米颗粒是一种纳米粒子.具有光敏感性质的物质.孔隙结构是一种多孔结构.

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科学领域:

材料科学材料科学材料科学
纳米技术纳米技术
光电学是指光电子产品.

背景情况:

多孔纳米结构为增强材料特性提供了较大的表面积.
脉冲激光沉积 (PLD) 是制造纳米结构薄膜的多功能技术.
ZnO和TiO2是光敏感应用的有希望的材料.

研究的目的:

通过大气脉冲激光沉积来研究光敏纳米结构的制造.
探索激光废弃方案 (纳秒与皮秒) 和目标成分 (ZnO与ZnO-TiO2) 对材料性能的影响.
在紫外线照射下描述制造的纳米结构的光敏度和电性质.

主要方法:

使用纳秒或皮秒激光器进行大气脉冲激光沉积 (PLD).
用金电极在石英基板上对纯 ZnO 或混合 ZnO-TiO2 目标进行切除.
沉积的纳米结构的结构,形态,光学和电气特征.
在紫外线照射下测量暗电流和光生成电流.

主要成果:

PLD成功地产生了高度多孔的ZnO和ZnO-TiO2纳米结构.
纳米秒沉积的样本与皮秒沉积的样本相比,显示出明显更高的黑暗和光生成电流 (高达10^3倍).
复合ZnO-TiO2样本显示光敏度的上升和衰减时间较长.
图秒沉积样本的吸收率较低,与缺陷相关的再组合率较高,限制了光电流.

结论:

激光消光模式对ZnO和ZnO-TiO2纳米结构的光敏性质产生了重大影响.
与皮秒PLD相比,纳秒PLD在制造高性能紫外线光敏感元件方面更有效.
复合材料和沉积参数可以调整以优化光传感器响应时间和性能.