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磁盘共振器陀螺仪的设计,制造和表征,具有抗振动和抗冲击能力
Zhaoyang Zhai1,2, Xiaorui Bie1, Bingchen Zhu1,2,3
1The State Key Laboratory of Transducer Technology, Aerospace Information Research Institute, Chinese Academy of Sciences, Beijing 100190, China.
Sensors (Basel, Switzerland)
|December 17, 2024
概括
这项研究优化了磁盘共振器陀螺仪 (DRG) 以提高振动和抗冲击能力. 增强的DRG实现0.63°/h的低角度随机步行 (ARW),显示出战术级潜力.
科学领域:
- 机械工程 机械工程
- 惯性导航系统 惯性导航系统
- 微电子机械系统 (MEMS) 是一种微电子机械系统.
背景情况:
- 磁盘共振陀螺仪 (DRG) 对于惯性导航至关重要.
- 现有的DRG面临着振动和冲击灵敏度的挑战.
- 提高DRG性能需要优化共振频率和质量因素.
研究的目的:
- 为了全面优化外部框架 DRG 设计.
- 为了提高对振动和冲击的抵抗力.
- 为了实现战术级性能指标.
主要方法:
- 浴和翻译模式的共振频率不断增加.
- 保持葡萄酒玻璃模式的高质量因素.
- 使用有限元分析 (FEA) 进行结构参数优化.
- 在 (100) 个单晶 (SCS) 上使用双面膜在绝缘体 (SOI) 工艺制造原型.
主要成果:
- 实现了0.63°/h的角度随机步行 (ARW).
- 表明偏差不稳定性 (BI) 为7.7°/h.
- 在振动环境下没有显著的性能下降.
结论:
- 优化的DRG设计显示了对振动和冲击的增强抵抗力.
- 取得的性能指标表明它适用于战术级应用.
- 使用 (100) SCS对于CMOS集成具有优势.
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