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通过碳复合膜从表面减少二次电子排放

Feipeng Wang¹, Jie He¹, Qi Zhao²

¹State Key Laboratory of Power Transmission Equipment Technology, School of Electrical Engineering, Chongqing University, Chongqing 400044, China.

|December 23, 2024

概括

我们开发了一种新的复合膜,用于抑制微波器件中的二次电子发射 (SEE). 这种化碳-涂层在上显著减少了电子排放,提高了设备的性能.

科学领域:

材料科学材料科学材料科学
等离子体物理学的物理学
表面科学是一门学科.

背景情况:

多重放电是微波设备中的一个关键问题,由二次电子发射 (SEE) 驱动.
抑制SEE对于管理功率水平和确保高功率微波系统的可靠性至关重要.

研究的目的:

在基板上开发一种新的碳-复合膜.
为了研究喷雾参数对薄膜微观地形和化学成分的影响.
为了评估开发的复合膜的SEE抑制能力.

主要方法:

在基板上涂抹聚四乙烯 (PTFE) 和.
控制基板温度和喷射功率比率的变化 (PTFE的射频功率与Ti的直流功率).
薄膜微观地图的特征,化学成分 (F/C分子比) 和二次电子产量.

主要成果:

喷射功率比率显著影响薄膜微观地形,从岛屿状的凸起到峰谷模式和光滑的表面.
与碳 (F/C) 摩尔比率主要受到喷射功率比率的影响.
一个峰值-山谷模式,以2的功率比率实现,最大限度地减少了SEE收益率,从2.99降至1.23.
这种减少归因于粗的表面和高的F / C比率,增强了电子捕获.

结论:

碳-复合膜有效地抑制了上的二次电子排放.
优化喷射功率比是定制薄膜微观地形和化学成分以提高SEE抑制的关键.
开发的复合膜为减轻微波器件中的多重放电提供了一个有希望的解决方案.

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