对温度敏感的离子液体的特征对使用前透的半导体废水从半导体废水中回收水的综合运行效率产生影响
1Department of Safety, Health and Environmental Engineering, Ming Chi University of Technology, New Taipei City 243303, Taiwan, ROC.
Chemosphere
|January 2, 2025
概括
两种新的离子液体[P4444][TMBS]和[P4444][Mal]被评估用于半导体制造中的前透废水回收. [P4444][Mal]证明了有效的水回收,在使用废热时显著降低了能源消耗.
科学领域:
- 化学工程是化学工程的重要组成部分.
- 环境科学 环境科学
- 材料科学 材料科学 材料科学
背景情况:
- 半导体制造产生大量的废水,增加了能源需求.
- 向前透 (FO) 提供了利用专门的吸水溶液回收废水的潜力.
- 高效的吸水溶液再生对于经济可行性至关重要.
研究的目的:
- 为了合成和评估两种较低的临界溶液温度离子液体 (LCST-ILs),作为FO的抽取溶液.
- 评估它们在回收来自Si-ingot的废水方面的表现.
- 为了确定集成FO工艺的能源效率.
主要方法:
- 三甲基硫酸 ([P4444][TMBS]) 和四甲基酸 ([P4444][Mal]) 的合成.
- 用真实的Si-ingot切割废水进行前透测试.
- 使用热刺激和能源消耗分析对吸取溶液再生的评估.
主要成果:
- [P4444][TMBS]实现了4.12 LMH的水流,而[P4444][Mal]达到2.67 LMH.
- [P4444][Mal]由于其疏水性,表现出较低的再生能量 (Ets) 和更高的再生比率.
- 使用低等级废热的[P4444][Mal]集成工艺只需要1.33kWh m−3.3的废热.
结论:
- 通过FO,LCST-IL对半导体废水回收充满希望.
- [P4444][Mal]提供了更节能和可回收的解决方案,特别是与废热相结合时.
- 这种方法显著降低了半导体制造的环境影响和运营成本.
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