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微架构材料的多光子和波成像

Brian W Blankenship¹, Daisong Pan², Eudokia Kyriakou^3,4

¹Laser Thermal Laboratory, Department of Mechanical Engineering, University of California, Berkeley, California 94720, United States.

ACS applied materials & interfaces

|January 3, 2025

概括

多光子光刻法 (MPL) 能够实现复杂的微观结构. 先进的成像技术,如二光子 (2P),三光子 (3P) 和第三子 (THG) 显微镜,为质量控制提供高保真度的3D重建.

科学领域:

微型制造和先进的成像技术
材料科学与工程材料科学与工程

背景情况:

微增材制造生产复杂的纳米到微尺度元件.
多光子光刻 (MPL) 是制造这些复杂结构的关键技术.

研究的目的:

评估两光子 (2P),三光子 (3P) 光成像和第三子 (THG) 显微镜,用于分析MPL制造的微观结构.
证明这些技术在非破坏性缺陷检测和质量控制方面的能力.

主要方法:

使用MPL制造周期性微型架构格子结构.
使用2P和3P光显微镜和THG显微镜进行高准确度3D成像.
使用折射率匹配的流体来增强成像深度和清晰度.

主要成果:

实现了光和低光微观结构的高保真3D重建.
与单光子方法相比,多光子光 (MPF) 成像的深度降低了信号衰减.
成功地识别了内部修改和压缩诱导的骨折,没有破坏性.

结论:

对于微添加制造的组件,MPF成像提供了优越的深度透.
2P,3P和THG显微镜是微型制造中质量控制和缺陷分析的强大工具.
这些先进的成像技术对于确保复杂的微观元件的完整性至关重要.

关键词:

添加剂制造添加剂制造添加剂制造缺陷缺陷缺陷缺陷缺陷微型架构的材料是微型架构的材料.多光子成像技术的多光子成像.聚合物是一种聚合物.两个光子聚合的聚合.

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