Mateusz Nieborek1, Dariusz Szmigiel2, Paweł Komorowski3

  • 1Institute of Microelectronics and Optoelectronics, Warsaw University of Technology, Koszykowa 75, 00-662, Warsaw, Poland.

Scientific reports
|January 3, 2025
PubMed
概括

聚合物厚度显著影响表面缓解格子 (SRG) 的深度. 较厚的聚合物薄膜可以制造高振幅变形,高达2μm,这对于理解SRG形成至关重要.

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