在单晶石墨烯生长中Ar对温度和流量分布的影响:惰性气体是活性气体

Peng Wang1, Dong Wang2, Chengmin Chen2,3

  • 1State Key Lab of Crystal Materials, Institute of Novel Semiconductors, Center for Optics Research and Engineering Shandong University, Jinan 250100, PR China.

ACS omega
|January 6, 2025
PubMed
概括

动态调节流可以增强单晶石墨烯的生长. 这种方法增加了石墨烯的大小,并通过在化学蒸气沉积过程中优化温度和流量场来减少核化部位.