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Microfluidic Chips Controlled with Elastomeric Microvalve Arrays
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完全集成的MEMS微和小型化的质量流传感器作为微剂量系统的基本组件.

Martin Seidl1, Gabriele Schrag1

  • 1Department of Electrical Engineering, TUM School of Computation, Information and Technology, Technical University of Munich, 80333 Munich, Germany.

Micromachines
|January 8, 2025
PubMed
概括

这项研究介绍了一种用于微流体系统的小型化微和质流传感器. 这些组件允许精确的气体送和垂直于芯片表面的流量测量,推进移动微流体应用.

科学领域:

  • 微系统工程 微系统工程
  • 流体动力学 流体动力学
  • 传感器技术 传感器技术

背景情况:

  • 微型微流体执行系统在移动设备上是有限的,尽管执行器的进步.
  • 现有的系统缺乏整合和有效的气体媒介送/传感.

研究的目的:

  • 为微流体系统开发一个集成的微流体平台,特别是微剂量.
  • 为移动应用提供一种新的微和质流传感器概念.

主要方法:

  • 开发了一种利用活性和静电驱动原理的微.
  • 设计了一个基于热线气流测量的质量流量传感器,集成到穿孔中.
  • 制造的原型尺寸为1.86 mm × 1.86 mm × 0.3 mm () 和1.4 mm × 1.4 mm × 0.4 mm (传感器).

主要成果:

  • 原型实现了气态介质的送速度高达110μL/分钟.
  • 的方向是垂直于芯片表面的.
  • 流量传感器的检测值约为10μL/分钟,范围高达20mL/分钟.

结论:

  • 开发的微和流量传感器为集成微流体开发平台提供了基础.
关键词:
在MEMS MEMS中使用.电静电驱动的启动方式电静电拉进作用 电静电拉进作用综合集成的整合.大质量流量传感器微量注射是一种微量注射.微流体学 在微流体学方面这是一个微型.

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  • 垂直流量能力可以直接与微集成.
  • 该系统显示出在移动设备中的微剂量和其他微流体应用的潜力.