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Updated: Jun 3, 2025

Real-Time DC-dynamic Biasing Method for Switching Time Improvement in Severely Underdamped Fringing-field Electrostatic MEMS Actuators
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Real-Time DC-dynamic Biasing Method for Switching Time Improvement in Severely Underdamped Fringing-field Electrostatic MEMS Actuators

Published on: August 15, 2014

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基于驱动电压调制的环形MEMS陀螺仪的范围扩展技术

Ke Cui1, Li Liu2, Daren An1

  • 1School of Instrument and Electronics, North University of China, Taiyuan 030051, China.

Micromachines
|January 8, 2025
PubMed
概括

在微电机系统 (MEMS) 陀螺镜中控制驱动电压可以调整灵敏度. 较低的电压显著扩展陀螺仪的陀螺仪.

关键词:
在MEMS环旋镜旋转镜.检测开放循环的检测.驱动控制循环中的驱动控制循环.在电路内调试.不线性的非线性.范围扩展 扩展范围扩展

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