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Subsurface Defect Localization by Structured Heating Using Laser Projected Photothermal Thermography
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多探测器同平台激光陀螺反射器基板缺陷检测原型的结构设计和模拟.

Jun Wang1,2,3, Zhenyang Li2,3, Maoxin Song2,3

  • 1University of Science and Technology of China, Hefei 230026, China.

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概括

本研究介绍了一种用于检测激光陀螺镜镜子基板缺陷的原型,实现超过170nm的分辨率. 稳定的设计确保了关键激光陀螺仪制造的可靠光学性能测试.

关键词:
光和黑暗领域的融合.激光陀螺旋转变器的使用方法多探测器相同的平台有图案和无图案的缺陷检测检测.结构设计的结构设计.

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科学领域:

  • 光学工程是指光学工程.
  • 材料科学 材料科学 材料科学
  • 计量学 计量学 计量学

背景情况:

  • 精确的缺陷检测对于制造激光陀螺仪系统中使用的超高反射镜来说至关重要.
  • 现有的方法可能缺乏复杂的镜子基板的分辨率或多功能性.

研究的目的:

  • 关于在激光陀螺镜镜子基板上检测和分类缺陷的原型系统.
  • 为了验证原型的性能,在有图案和没有图案的表面上进行反射和传输测量.

主要方法:

  • 开发了一种具有双亮场和暗场测量通道的原型.
  • 利用Ansys软件在运输条件下对关键组件进行结构模拟.
  • 使用激光陀螺镜反射基板和美国空军1951年板进行实验测试.

主要成果:

  • 安西斯的模拟证实了原型的稳定性,其最大静态变形为4.65微米,共振频率高于230赫兹.
  • 实验测试表明,在反射和传输表面都能有效检测缺陷.
  • 实现了超过170nm的缺陷检测分辨率,符合设计规格.

结论:

  • 原型展示了强大的结构稳定性,适合光学性能测试.
  • 该系统可以有效地检测激光陀螺镜镜子基板上的亚微米缺陷.
  • 开发的原型符合激光陀螺仪制造的严格要求.