主题编辑:意大利的MEMS.
1Department of Civil and Environmental Engineering, Politecnico di Milano, 20133 Milano, Italy.
Micromachines
|January 8, 2025
概括
微电子机械系统 (MEMS) 在过去的三十年中在能力和采用方面取得了显著的进步. 这一进步凸显了它们在各种技术应用中的日益重要.
科学领域:
- 工程和材料科学 工程和材料科学
- 专注于微尺度设备的设计,制造和应用.
背景情况:
- 微电子机械系统 (MEMS) 在过去的30年中经历了实质性的发展.
- 这种演变包括它们固有的潜力和跨行业的广泛采用.
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