相关实验视频

Updated: Jun 7, 2026

Time Multiplexing Super Resolving Technique for Imaging from a Moving Platform

Time Multiplexing Super Resolving Technique for Imaging from a Moving Platform

Published on: February 12, 2014

在多维干扰测量测量系统中,机器上分离和补偿目标镜的表面形状错误

Zuyang Zhang^1,2, Qiangxian Huang^1,2, Jun Lu^1,2

¹School of Instrument Science and Opto-Electronic Engineering, Hefei University of Technology, Hefei 230009, China.

The Review of scientific instruments

|January 8, 2025

概括

本研究提出了一种新的方法,用于分离和补偿多维干扰测量中的目标镜误差. 该技术通过将平度误差从175nm降低到77nm,显著提高了测量精度.

科学领域:

计量学计量学计量学
纳米技术纳米技术
光学工程是指光学工程.

背景情况:

干扰测量对于多维纳米定位和纳米测量设备至关重要.
目标镜被用作空间参考平面,但它们的表面误差限制了测量准确性.
现有的方法很难将目标镜错误与工件尺寸分离.

研究的目的:

开发一种用于机器上分离和补偿目标镜表面形状错误的方法.
为了提高多维干扰系统的整体测量精度.
为实际应用提供可靠的补偿模型.

主要方法:

使用微纳米坐标测量机 (MNCMM) 进行干扰测量.
使用自制的共振探头和参考平板晶体进行错误分离.
实现基于衍生模型的空间错误补偿的插值算法.

主要成果:

成功分离并补偿了目标镜面形状错误.
将标准平晶的平度测量误差从175nm降低到77nm.
证明了拟议的机器内补偿方法的可靠性和有效性.

结论:

开发的方法有效地弥补了干扰测量系统中目标镜面错误.
这种方法显著提高了多维计量学的精度.
该技术广泛适用于纳米测量器件中的各种机器补偿场景.

更多相关视频

Medical-grade Sterilizable Target for Fluid-immersed Fetoscope Optical Distortion Calibration

Medical-grade Sterilizable Target for Fluid-immersed Fetoscope Optical Distortion Calibration

Published on: February 23, 2017

Gain-compensation Methodology for a Sinusoidal Scan of a Galvanometer Mirror in Proportional-Integral-Differential Control Using Pre-emphasis Techniques

Gain-compensation Methodology for a Sinusoidal Scan of a Galvanometer Mirror in Proportional-Integral-Differential Control Using Pre-emphasis Techniques

Published on: April 4, 2017

相关概念视频

Distance Corrections

Distance Corrections

To achieve precise distance measurements, especially in surveying and construction, certain corrections must be applied to account for potential sources of error like the standardization errors, temperature variations, and slope adjustments.Standardization error emerges when measurement equipment undergoes changes, such as wear, repairs, or weather impacts. To address this, surveyors compare the equipment’s readings to a standard. This process identifies any deviation that might lead to...