含有酸盐的薄膜的蒸汽阶段沉积,使用二甲基乙烯基酸盐作为前体
Juan Santo Domingo Peñaranda1, Arpan Dhara1, Aditya Chalishazar1
1Department of Solid State Sciences, CoCooN research group, Ghent University, Krijgslaan 281 (S1), 9000 Gent, Belgium. christophe.detavernier@ugent.be.
Dalton transactions (Cambridge, England : 2003)
|January 9, 2025
概括
研究人员开发了使用二甲基乙烯基酸盐 (DMVP) 制造酸盐薄膜的新方法. 涉及臭氧处理的ABCD工艺产生了更稳定的薄膜,具有更好的合和功能化.
科学领域:
- 材料科学 材料科学 材料科学
- 化学工程是化学工程的重要组成部分.
- 纳米技术 纳米技术
背景情况:
- 含的材料对于能源,催化和生物材料至关重要.
- 金属酸盐固体和薄膜提供了卓越的热和化学稳定性.
- 酸盐混合体的蒸汽阶段沉积是一个尚未探索的领域.
研究的目的:
- 探索酸盐薄膜的蒸汽相沉积技术.
- 调查二甲基乙烯基酸盐 (DMVP) 作为前体的使用.
- 为了比较三步 (ABC) 和四步 (ABCD) 存款流程.
主要方法:
- 使用了三甲基 (TMA),水 (H2O) 和DMVP暴露 (ABC过程) 的交替使用.
- 实施了ABCD过程,并增加了O3步骤以实现现场功能化.
- 使用里埃变换红外光谱学 (FTIR) 和X射线光电子光谱学 (XPS) 分析电影.
主要成果:
- 在ABC和ABCD过程中实现了良好的前体和.
- 在100-250°C之间,ABCD过程显示出更稳定的增长 (0.54-0.38 Å/周期).
- 在ABCD膜中显示了碳酸盐信号和更高的合物 (P/Al=0.27在250°C).
结论:
- 通过蒸汽相沉积成功沉积了含酸盐的薄膜.
- 在ABCD过程中的臭氧处理使得在位子功能化到碳酸基.
- 薄膜在火和在水中缓慢氧化后表现出高达400°C的稳定性.
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