在HfO2基铁电膜中通过电极设计稳定Schottky-to-Ohmic切换
Moritz L Müller1, Nives Strkalj1,2, Maximilian T Becker1,3,4
1Department of Materials Science and Metallurgy, University of Cambridge, CB3 0FS, Cambridge, UK.
Advanced science (Weinheim, Baden-Wurttemberg, Germany)
|January 10, 2025
概括
电极对于铁电电阻开关 (RS) 装置至关重要. 优化的电极可以实现稳定的Schottky-to-Ohmic过渡 (SOT) 和合并的铁电和丝状RS,从而提高设备的性能.
科学领域:
- 固态物理 固态物理
- 材料科学 材料科学 材料科学
- 设备物理 设备物理
背景情况:
- 基于HfO2的铁电膜是阻力开关 (RS) 设备的关键.
- 了解电极影响对于铁电RS设备优化至关重要.
研究的目的:
- 在基于Hf0.93Y0.07O2 (YHO) 的设备中调查Schottky-to-Ohmic过渡 (SOT) 中的电极作用.
- 分析电极特性如何影响联合铁电和丝状RS机制.
主要方法:
- 在NbSTO或LSMO基板上制造超薄的表轴铁电YHO薄膜.
- 使用了TiadoseAu顶部电极和各种电极材料和厚度.
- 在修改后的设备堆上进行运输测量.
主要成果:
- 具有设计电极的设备展示了联合的丝状RS和铁电开关.
- 在 10^5 个周期中实现了 >100 的 ON/OFF 比率.
- 观察到不完整的SOT与顶部电极厚度/材料或LSMO厚度的变化.
结论:
- 氧反应电极和降低导电性的底部电极稳定了SOT.
- 电极工程对于提高铁电RS设备性能至关重要.
- 与丝状RS机制的集成为改善设备功能提供了一条途径.
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