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在增材制造中使用双墙TPMS控制12英寸半导体晶圆芯片的温度统一性控制

Sohyun Park1, Jaewook Lee2, Seungyeop Lee1

  • 1Daegyung Technology Application Division, Korea Institute of Industrial Technology, Daegu-si 42994, Republic of Korea.

Materials (Basel, Switzerland)
|January 11, 2025
PubMed
概括

三次周期性最小表面 (TPMSs) 提高了半导体检查的晶圆温度统一性. 这种新的双墙TPMS设计增强了热传递,提高了检查速度和精度.

关键词:
添加剂制造 添加剂制造 添加剂制造双墙TPMS是双墙的TPMS.温度的统一性是一致性.热流体CFD分析晶圆探针查克的探针

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