线,PDMS

Harikrishna Sahu1, Mingzhe Li2, Madhubanti Mukherjee1

  • 1School of Materials Science and Engineering, Georgia Institute of Technology, Atlanta, Georgia 30332, United States.

概括

深紫外线 (DUV) 光通过原子氧将聚二甲基 (PDMS) 转化为二氧化. 这一过程将甲基组替换为基组,使能效的制造成为可能.