聚合物表面的功能化用于有机光电阻材料
Roberto C Longo1, Xiuyao Lang2, Shyam Sridhar1
1Tokyo Electron America, Inc., 2400 Grove Blvd., Austin, Texas 78741, United States.
ACS applied materials & interfaces
|January 13, 2025
概括
本研究探讨了光电阻聚合物的表面功能化,使用密度功能理论 (DFT). 这项研究确定了有效的策略来提高蚀刻阻力,这对于先进的微型制造和半导体制造至关重要.
科学领域:
- 材料科学 材料科学 材料科学
- 计算化学计算化学
- 表面科学是一门学科.
背景情况:
- 光电阻对于微制造至关重要,使得通过暴露后的溶解度变化实现模式传输.
- 由于光子相互作用,当前的有机光电阻在分辨率,灵敏度和线边粗性方面面临限制.
- 提高蚀刻阻力对于在基板蚀刻过程中保存特征至关重要.
研究的目的:
- 研究光电阻聚合物的表面功能化,以提高性能.
- 通过使用DFT在聚合物表面上探索反应性素吸附.
- 识别用于增强蚀刻抗性的策略,并通过计算验证它们.
主要方法:
- 密度功能理论 (DFT) 用于表面反应分析.
- 物理和化学表面反应和副产品的识别.
- 初始分子动力学 (AIMD) 和实时时间依赖DFT (rt-TDDFT) 用于离子/电子相互作用研究.
主要成果:
- 确定了各种功能化剂的自我限制值.
- 分析的光谱信号用于实验验证表面变化的验证.
- 验证的功能化作为增强蚀刻耐用的有效策略.
结论:
- 对离子和电子相互作用的计算洞察与功能化的光电阻.
- 确定改善光电阻聚合物性能的明确策略.
- 通过增强的光电阻材料实现的先进的微型制造能力.
相关概念视频
Polymer Classification: Stereospecificity
2.4K
Polymerization generates chiral centers along the entire backbone of a polymer chain. Accordingly, the stereochemistry of the substituent group has a significant effect on polymer properties. Polymers formed from monosubstituted alkene monomers feature chiral carbons at every alternate position in the polymer backbone. Relative to the predominant orientation of substituents at the adjacent chiral carbons, the polymer can exist in three different configurations: isotactic, syndiotactic, and...
2.4K
Polymers
34.9K
The word polymer is derived from the Greek words “poly” which means “many” and “mer” which means “parts”. Polymers are long chains of molecules composed of repeating units of smaller molecules, known as monomers. They either occur naturally, such as DNA and proteins, or can be constructed synthetically, like plastics. They have varied structural characteristics, such as linear chains, branched chains, or complex networks, that contribute to the...
34.9K
Anionic Chain-Growth Polymerization: Overview
2.1K
The polymerization process that involves carbanion as an intermediate is called anionic polymerization. It is also a type of addition or chain-growth polymerization. Anionic polymerization gets initiated by a strong nucleophile such as an organolithium or a Grignard reagent. The most commonly used initiator for anionic polymerization is butyl lithium. Monomers involved in anionic polymerization must possess a vinyl group bonded to one or two electron-withdrawing groups. For instance,...
2.1K
Cationic Chain-Growth Polymerization: Mechanism
2.2K
The cationic polymerization mechanism consists of three steps: initiation, propagation, and termination. In the initiation step of the polymerization process, the π bond of a monomer gets protonated by the Lewis acid catalyst, which is formed from boron trifluoride and water. The protonation of the π bond generates a carbocation stabilized by the electron‐donating group. In the propagation step, the π bond of the second monomer acts as a nucleophile and attacks the...
2.2K
Polymer Classification: Architecture
2.6K
Polymers are classified as linear or branched on the basis of their chain architecture. The polymer chains in linear polymers have a long chain-like structure with minimal to no branching at all. Even if a polymer features large substituent groups on the monomer, which appear as branches to the skeleton, it is not considered a branched polymer. A branched polymer contains secondary polymer chains that arise from the main polymer chain. The branching occurs when the polymer growth shifts from...
2.6K


