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在现场聚焦离子束重置表面涂层,以通过原子探测器断层学进行特定地点,近地表表征

Bavley Guerguis¹, Ramya Cuduvally^1,2, Gabriel Arcuri²

¹Department of Materials Science and Engineering, McMaster University, Hamilton, Ontario L8S 4L7, Canada.

Microscopy and microanalysis : the official journal of Microscopy Society of America, Microbeam Analysis Society, Microscopical Society of Canada

|January 13, 2025

概括

聚焦离子束 (FIB) 的重新配置为原子探头断层扫描 (APT) 样品准备创建了保护性涂层. 这种"自我涂层"技术提高了样品质量,并减少了用于先进材料分析的骨折.

科学领域:

材料科学材料科学材料科学
分析化学分析化学
表面科学是一门学科.

背景情况:

原子探头断层扫描 (APT) 提供了近原子分辨率的3D化学映射.
使用聚焦离子束 (FIB) 显微镜精确的样本制备对于APT至关重要.
FIB削可能会损坏样品,需要对感兴趣区域 (ROI) 进行保护性表面涂层.

研究的目的:

探索FIB诱导的重新配置作为APT中针对性表面涂层的方法.
引入和评估APT样品准备的"自我涂层"概念.
为了证明各种材料的现场重新放置涂层的有效性.

主要方法:

使用FIB喷雾来诱导表面涂层的材料重新配置.
开发并应用"自我涂层",使用样本材料盖层.
在基于Si的半导体和用于APT分析的Fe-Mn合金上测试了涂层.

主要成果:

使用四种不同的材料成功地应用了现场重新沉积涂层.
自涂层最大限度地降低了现场蒸发值差异,减少了过早的样本断裂.
评估的因素如标本产量,涂层质量和ROI识别证明了有效性.

结论:

FIB重置是一种多功能技术,用于为APT创建有效的表面涂层.
自涂层为高质量的APT样品提供了一条途径,具有改进的接口属性.
这种方法增强了针对特定地点的近地APT调查的例行样本准备工作流程.

关键词:

在现场涂层.原子探头断层扫描 (tomography) 是一种原子探头.聚焦的离子束.样品的准备样品的准备一个半导体半导体.

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