提高使用等离子体能量膨胀温度计 (PEET) 对TEM样本温度测量的准确性:解决样本厚度影响
Yi-Chieh Yang1, Luca Serafini2, Nicolas Gauquelin2
1National Centre for Nano Fabrication and Characterization (DTU Nanolab), Technical University of Denmark (DTU), Kgs. Lyngby, Denmark.
Ultramicroscopy
|January 15, 2025
概括
等离子体能量膨胀温度计 (PEET) 准确地绘制了 (W) 板块的局部温度,最高可达700°C. 样品厚度会影响温度测量,但光束扩大可以提高不同厚度的精度.
科学领域:
- 材料科学 材料科学 材料科学
- 纳米技术纳米技术
- 分析化学 分析化学
背景情况:
- 在纳米尺度和高温下进行现场材料表征现在可以使用先进的扫描传输电子显微镜 (STEM) 和微电子机械系统 (MEMS) 微热器.
- 准确的局部温度测绘对于理解现场实验期间的热诱导现象至关重要.
研究的目的:
- 为了研究等离子体能量膨胀温度计 (PEET) 在 (W) 板上进行局部温度映射的准确性.
- 为了确定样品厚度 (30-70纳米) 对温度依赖的等离子体能量测量的影响.
主要方法:
- 使用分析扫描传输电子显微镜 (STEM) 与基于MEMS的微热器进行现场加热.
- 使用等离子体能量膨胀温度计 (PEET) 来测量板中的局部温度,从室温到700°C.
- 分析了等离子体能量转移,温度和样本厚度之间的关系.
主要成果:
- PEET可以准确地绘制高达700°C的中的局部温度.
- 在中等离子体能量转移取决于温度和样品厚度,大约在60nm以下.
- 来自FIB沉积的压力和较薄区域的热膨胀增加有助于厚度依赖的等离子体能量.
结论:
- 在电子透明的TEM样本中,必须考虑样品厚度的变化,以准确地测量PEET温度.
- 随着厚度的降低而增加散装等离子体峰值扩大 (FWHM),可以提高不同厚度的样品中的PEET精度.
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