使用双光束FIB-SEM使用薄膜制备TEM样本的特定场地图景 (S) 图景
Supriya Ghosh1, Fengdeng Liu1, Sreejith Nair1
1Department of Chemical Engineering and Materials Science, University of Minnesota, Minneapolis, MN 55455, USA.
Ultramicroscopy
|January 18, 2025
概括
使用聚焦离子束扫描电子显微镜 (FIB-SEM) 的新方法使薄膜高质量,特定于地点的平面视图传输电子显微镜 (TEM) 样本准备成为可能. 这便于对基板上的材料进行原子分辨率分析.
科学领域:
- 材料科学 材料科学 材料科学
- 纳米技术 纳米技术
- 电子显微镜电子显微镜
背景情况:
- 传输电子显微镜 (TEM) 需要来自多个非对线方向的样本来进行全面的原子结构和属性评估.
- 从基板上的薄膜中准备平面视图TEM样本是具有挑战性的,限制了纳米尺度设备分析.
研究的目的:
- 提出一种新的方法,用于从生长在基板上的薄膜中制备高质量的,特定于地点的平面视图TEM样本.
- 为了证明该方法的适用性,使用矿氧化物和金属氧化物薄膜.
主要方法:
- 使用双束聚焦离子束扫描电子显微镜 (FIB-SEM) 系统进行特定地点的样本准备.
- 在SrTiO3上制备了20-80纳米的BaSnO3薄膜,在TiO2基板上制备了IrO2,使用分子束表达.
- 评估样品质量和原子分辨率成像能力,使用偏差校正扫描传输电子显微镜 (STEM).
主要成果:
- 成功地从各种薄膜/基板系统中准备了高质量的,特定于现场的,平面视图的TEM样本.
- 证明了该方法在原子分辨率成像和分析方面的有效性.
- 证实了该方法适用于厚度在20-80nm之间的薄膜的适用性.
结论:
- 开发的FIB-SEM方法克服了对基板上薄膜的计划视图TEM样本准备方面的挑战.
- 该技术适用于原子分辨率成像和分析,促进材料表征.
- 该方法可以扩展到其他特定地点的样本和基于晶圆的设备.
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