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Thomas Michels1, Vladimir Aksyuk1

  • 1Center for Nanoscale Science and Technology, National Institute of Standards and Technology, Maryland, USA.

Technical digest. Solid-State Sensor, Actuator, and Microsystems Workshop
|January 20, 2025
PubMed
概括

我们使用微电机系统 (MEMS) 技术开发了一种紧的芯片上的光机械传感器. 该设备实现了先进的共振和非共振传感器的超低位移噪声.