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从电子束诱导沉积制造的缩入沉积物中确定前体粘合系数

Alexander Kuprava¹, Michael Huth¹

¹Physics Institute, Goethe University Frankfurt, Max-von-Laue-Str. 1, 60438 Frankfurt am Main, Germany.

Beilstein journal of nanotechnology

|January 21, 2025

概括

这项研究引入了一种新的方法,用于确定聚焦电子束诱导沉积 (FEBID) 模拟的前体参数. 研究发现,常见前体的粘合系数明显较低,影响了纳米结构生长模型.

科学领域:

材料科学材料科学材料科学
纳米技术纳米技术
计算物理计算物理

背景情况:

聚焦电子束诱导沉积 (FEBID) 是纳米制造的一个关键技术.
精确模拟FEBID需要精确的前体参数,特别是粘合系数.
确定这些参数的现有方法是有限的.

研究的目的:

为FEBID模拟开发一种系统的方法来导出前体参数.
为了确定前体的粘合系数 bis (() 和三甲基 ((甲基cyclopentadienyl) .
为了研究前体粘合系数的温度依赖性.

主要方法:

采用了快速模拟方法,结合了扩散反应和蒙特卡洛方法.
分析FEBID的不同增长模式,特别是扩散增强增长.
在不同基板温度下实验确定Cr{C6H6) 2和Me3CpPtMe的粘合系数.

主要成果:

成功引入了一种用于导出前体粘合系数的新方法.
对于Cr(C6H6) 2和Me3CpPtMe,确定了大约10^-2的粘合系数.
确定的粘合系数大大低于之前对Me3CpPtMe的假设值.
观察到粘合系数的温度依赖.

结论:

开发的方法提供了一种可靠的方式,以获得FEBID模拟的关键前体参数.
低于预期的粘合系数需要对当前的FEBID模拟模型进行修订.
了解粘合系数的温度依赖性,可以改善对纳米结构生长的控制.

关键词:

一个叫做FEBID的女生.吸附吸附是一种吸附.连续模型的连续模型.纳米制造的纳米制造这就是粘合系数的粘合系数.

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