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Updated: May 31, 2025

Fabrication and Testing of Photonic Thermometers
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Published on: October 24, 2018

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对CMOS兼容的Pirani仪表进行理论和实验研究,并采用温度补偿模型

Shizhen Xu1, Gai Yang1, Junfu Chen1

  • 1The School of Integrated Circuits and Electronics, Beijing Institute of Technology, 100081, Beijing, China.

Microsystems & nanoengineering
|January 22, 2025
PubMed
概括

一个新的CMOS兼容的Pirani真空仪利用表面微加工和温度补偿来提高灵敏度和稳定性. 这种先进的真空传感器提供了较低的检测极限,使其适用于苛刻的应用.

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