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Updated: Jun 18, 2026

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Published on: August 12, 2012

作为小型单芯片植入物的微包装解决方案,ALD和帕利-ALD多层的体内生物稳定性评估

Kambiz Nanbakhsh¹, Matthias Van Gompel², Riina Ritasalo³

¹Department of Microelectronics, Faculty of Electrical Engineering, Mathematics and Computer Science, Delft University of Technology, Delft, 2628 CN, The Netherlands.

Small (Weinheim an der Bergstrasse, Germany)

|January 23, 2025

概括

两种用于神经植入物的新型微包装涂层在体内测试了7个月. 基于 hafnium 的多层涂层显示出卓越的生物稳定性,这对于长期植入物性能至关重要.

科学领域:

生物材料科学是生物材料的科学.
神经技术的神经技术
材料工程是材料的工程.

背景情况:

推进活跃神经植入器需要强大的微包装,以确保身体内的长期功能稳定性.
薄膜涂层对于保护可植入电子产品免受腐蚀性的生物环境而言至关重要.

研究的目的:

在7个月的时间内评估两种不同的薄膜微型包装涂层的生物稳定性和体内性能.
评估这些涂层对于下一代神经植入物应用的适用性.

主要方法:

两个具有不同微观图形的微芯片被涂上基于 hafnium 的多层 (ALD-ML) 或混合 Parylene C/titanium 多层堆 (ParC-ALD-ML).
涂层微芯片进行了为期7个月的体内动物研究.
暴露后分析包括光学显微镜,横截面扫描电子显微镜和飞行时间二次离子质谱 (ToF-SIMS).

主要成果:

≈100nm无机哈基多层 (ALD-ML) 呈现出极好的生物稳定性,在7个月后没有出现离子透的迹象.
≈6微米的混合Parylen C和基于的多层堆 (ParC-ALD-ML) 在外层Parylen C层中显示了表面降解和离子入.

结论:

基于 hafnium 的多层涂层为神经植入物微包装提供了卓越的长期生物稳定性.
这些发现为材料选择和设计提供了关键数据,以提高未来芯片嵌入神经植入物的可靠性.

关键词:

在PDMS中使用PDMS.在这种情况下,基基基基基基基基基基基基基基基基基基基基基基基基基基基基基基基基基基基基原子层沉积的原子层沉积.生物流体屏障是生物流体的障碍.微包装是一种微包装.

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