对高精度长度测量的光学干扰仪的审查
Guangyao Huang1,2, Can Cui2, Xiaoyang Lei1
1College of Intelligence Science and Technology, National University of Defense Technology, Changsha 410073, China.
Micromachines
|January 25, 2025
概括
光学干涉计,特别是网格和激光方法,提供高精度的长度测量. 进步包括光学频率,提高了精密计量学的范围和精度.
科学领域:
- 计量学 计量学 计量学
- 光学工程是指光学工程.
- 精确度测量 精确度测量 精确度测量
背景情况:
- 光学干扰仪对于科学和工业中高精度的长度测量至关重要.
- 现有的方法在准确性和测量范围方面面临挑战.
研究的目的:
- 提供对光学干涉测量的最新进展进行全面的审查.
- 专注于格子和激光干扰测量技术.
- 突出提高测量精度的创新.
主要方法:
- 对网格干涉测量系统 (单度至多度自由度) 的审查.
- 激光干涉测量方法的比较 (同质,异质,白光).
- 集成光学频率子,以扩大功能.
主要成果:
- 光学频率可以显著提高激光干扰仪的测量范围和精度.
- 分析周期性非线性误差和相模拟,以提高精度.
- 确定当前的挑战和未来的研究方向.
结论:
- 光学干涉测量继续进步,由光学频率毛等新技术驱动.
- 解决非线性误差和精炼阶段解调是未来精度增长的关键.
- 对干扰测量系统的创新对于精密计量学的进步至关重要.
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