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Wenqi Yang1, Yong Ruan2, Zhiqiang Song3

  • 1Instrument Science and Opto-Electronics Engineering, Beijing Information Science and Technology University, Beijing 100192, China.

Micromachines
|January 25, 2025
PubMed
概括

本研究确定了金属屏蔽层的最佳窗口大小,以防止在MEMS传感器的玻璃阳极粘合过程中发生粘附故障. 这些发现通过减轻静电拉入问题来确保可靠的晶圆级包装.