金属屏蔽层对静电吸引问题在玻璃-阳极结合中的金属屏蔽层的影响
Wenqi Yang1, Yong Ruan2, Zhiqiang Song3
1Instrument Science and Opto-Electronics Engineering, Beijing Information Science and Technology University, Beijing 100192, China.
Micromachines
|January 25, 2025
概括
本研究确定了金属屏蔽层的最佳窗口大小,以防止在MEMS传感器的玻璃阳极粘合过程中发生粘附故障. 这些发现通过减轻静电拉入问题来确保可靠的晶圆级包装.
科学领域:
- 材料科学 材料科学 材料科学
- 电气工程 电气工程
- 微电子机械系统 (MEMS) 是一种微电子机械系统.
背景情况:
- 阳极粘合对于MEMS传感器晶圆级包装至关重要.
- 在粘合过程中,静电力会导致粘合失效.
研究的目的:
- 确定金属屏蔽层中的关键窗口大小,以有效屏蔽电场.
- 为了防止在阳极结合过程中由于静电吸引引起的设备故障.
主要方法:
- 一个双端坚固支的悬臂梁平行板电容器结构的设计.
- 理论计算,模拟分析和实验测试.
- 对一个Cr/Au金属盾 (400 Å Cr, 3400 Å Au) 的研究.
主要成果:
- 在金属层中的关键窗口开口大小被确定为180μm × 180μm.
- 可移动部分和底部之间的5微米间隙可以防止粘合失败.
- 金属屏蔽层有效地防止了二次阳极粘合中的吸入问题.
结论:
- 优化的金属屏蔽层设计可以防止MEMS设备的静电拉入故障.
- 这项研究为MEMS传感器的可靠晶圆级包装提供了关键参数.
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