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辐射电极覆盖对液体部署PMUT性能的影响:动态和动力学研究

Stephen Sammut¹, Edward Gatt², Ruben Paul Borg³

¹Institute of Engineering and Transport, Malta College of Arts, Science and Technology (MCAST), PLA 9032 Paola, Malta.

|January 25, 2025

概括

优化压电层的优化

科学领域:

材料科学与工程材料科学与工程
土木工程土木工程是指土木工程.
声学声学在声学方面

背景情况:

微传感器对于钢筋混凝土的结构健康监测 (SHM) 是至关重要的.
压电MEMS超声波传感器 (PMUT) 是这些微传感器中的关键发射元件.
有效的液体合对于钢筋混凝土孔溶液中的PMUT至关重要,以实现最佳的声能传输.

研究的目的:

为了优化中心电极的辐射覆盖百分比,用于循环PMUTs.
为了提高PMUT在钢筋混凝土中用于SHM应用的性能.
使用液态合流体提高声能传输效率.

主要方法:

用于模拟的有限元模型 (FEM).
激光振动计用于实验动力学分析.
用于动态表征的声测量.
时间域FEM分析用于隔膜运动可视化.

主要成果:

辐射电极覆盖率在65%到70%之间显著提高PMUT隔膜的特性.
优化的PMUT在电信号激发下表现出更好的动力学和动态性能.
FEM分析可视化了不同辐射覆盖范围的隔膜运动.

结论:

优化中央电极的辐射盖对于PMUT在SHM中的性能至关重要.
65-70%的辐射覆盖范围为使用液体合的PMUT提供了卓越的性能.
这种优化可以通过降低传感器密度来实现更高效和更具成本效益的SHM系统.

关键词:

在MEMS MEMS中使用.在PMUTUT中使用.有限元素建模的模型.辐射电极覆盖器辐射电极盖结构健康监测结构健康监测超声波是一种超声波.

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