单轴感应应力传感器的设计和应用
Kaituo Wu1, Zixun Xiang1, Xinbo Lu1
1State Key Laboratory of Electronic Thin Films and Integrated Devices, University of Electronic Science and Technology of China, Chengdu 611731, China.
Micromachines
|January 25, 2025
概括
这项研究引入了微系统的新型单轴应力传感器,简化了集成和信号解码. 传感器使用条电阻和Wheatstone桥进行精确的应力测量和方向检测,增强微系统健康监测.
科学领域:
- 材料科学 材料科学 材料科学
- 电气工程 电气工程
- 机械工程 机械工程
背景情况:
- 目前用于微系统的应力传感器面临着重要的集成和信号解码挑战.
- 现有的解决方案往往缺乏广泛的微系统应用所需的简单性和效率.
研究的目的:
- 为微系统开发一个实时,单轴敏感的应力传感器.
- 克服当前应力传感技术的集成和信号解码局限性.
主要方法:
- 拟议的传感器是使用不同轴敏度的条电阻的简单组合构建的.
- 用于信号采集和放大,采用了惠斯顿桥架配置.
- 传感器的性能通过模拟和实验测试来验证.
主要成果:
- 传感器显示测试灵敏度为0.1 mV/V·MPa,与模拟值为0.087 mV/V·MPa.
- 该设计允许进行简单的校准,以测量单轴应力大小.
- 双向应力的大小和方向可以通过传感器旋转来检测.
结论:
- 开发的应力传感器提供了一个结构简单和程序简单的解决方案.
- 与现有方法相比,它表现出更好的温度稳定性和更少的接口要求.
- 这种传感器非常适合用于多芯片微系统芯片的健康监测.
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