用电容加速度计节能开关的ASIC接口设计
Juncheng Cai1, Yongbin Cai1, Xiangyu Li2,3
1Hangzhou Sotry Automatic Control Tech Co., Ltd., Hangzhou 311112, China.
Micromachines
|January 25, 2025
概括
本研究介绍了一种新型的开关电容器 (SC) 接口ASIC,用于高精度,低功耗的MEMS加速度计. 该设计实现了卓越的性能,满足了地理话机应用的关键需求.
科学领域:
- 电气工程 电气工程
- 材料科学 材料科学 材料科学
- 传感器技术 传感器技术
背景情况:
- 微电机系统 (MEMS) 加速度计对于民用应用至关重要.
- 使用开关电容器 (SC) 电路的闭环加速度计提供低功率和高SNR.
- 现代地声器需要高精度,低功耗的MEMS加速度计.
研究的目的:
- 为MEMS加速度计设计和实施一个闭环接口应用特定集成电路 (ASIC).
- 为满足地声系统中对高精度和低功耗加速度计的需求.
- 为了优化功耗和增强加速度计接口的动态范围.
主要方法:
- 在接口电路中使用开关电容器调制技术.
- 包含一个低噪音的电荷放大器,样品和持有电路,集成器和时钟分隔器.
- 采用开关操作放大器 (op-amp) 技术来最大限度地降低功耗.
- 实现了AB类输出阶段以改善动态范围.
- 使用标准的0.35微米CMOS工艺制造设计.
主要成果:
- 在3.3V电源下实现了3.3mW的功耗.
- 证明了加速度计噪声密度低于1μg/√Hz.
- 获得的灵敏度为1.65V/g,测量范围为±1g.
- 报告的非线性为0.15%,带宽为300Hz,偏差稳定性为~36μg.
结论:
- 拟议的开关电容器接口ASIC有效地满足了对高精度MEMS加速度计的严格要求.
- 该设计展示了一个可行的解决方案,用于低功耗,高性能加速度计应用在地声器.
- 实现的性能指标验证了实施的设计技术的有效性.
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