通过选择性区域增长模拟正常关闭的垂直GaN MOSFET,使用新增增强侧墙通道进行模拟
Jiyao Du1,2,3, Taofei Pu4, Xiaobo Li4
1School of Automation and Electrical Engineering, Shenyang Ligong University, Shenyang 110159, China.
Micromachines
|January 25, 2025
概括
这项研究引入了一种新的正常关闭化 (GaN) MOSFET,设计具有增强的侧墙通道. 优化p-GaN层和p-GaN屏蔽可显著提高功率电子应用的性能.
科学领域:
- 材料科学 材料科学 材料科学
- 电气工程 电气工程
- 半导体设备物理 半导体设备物理
背景情况:
- 化 (GaN) 金属氧化物半导体场效应晶体管 (MOSFET) 对于高功率和高频应用至关重要.
- 在保持高性能的同时,在垂直的GaN MOSFET中实现正常关闭运行仍然是一个挑战.
研究的目的:
- 提出并模拟一个新的正常关闭的垂直GaN MOSFET,具有增强的侧墙通道.
- 优化设备参数以提高传导能力,值电压和故障电压.
- 调查p-GaN层特性和p-GaN屏蔽对设备性能的影响.
主要方法:
- 技术计算机辅助设计 (TCAD) 模拟用于设计和分析拟议的MOSFET结构.
- 使用选择性区域增长过程,同时形成沟结构和增强侧墙通道.
- 设备参数,包括p-GaN度,厚度和p-GaN屏蔽,被系统地优化.
主要成果:
- 拟议的设备在侧壁上具有增强的AlGaN/GaN通道,比传统的沟式MOSFET提高了传导能力.
- 优化p-GaN层参数 (度和厚度) 对于平衡值电压,状态电阻和状态外故障电压至关重要.
- 一个p-GaN屏蔽层有效调节了沟底的电场,增强了交叉点终端的延伸.
结论:
- 通过使用TCAD模拟,成功设计了一种具有增强侧墙通道的新型正常关闭垂直GaN MOSFET.
- 该研究强调了精确控制p-GaN层属性的重要性,以及战略性地使用p-GaN屏蔽来实现最佳设备性能.
- 设计的GaN MOSFET对先进的功率电子应用具有有希望的特性,实现了高Baliga的优点.
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