在片上氧化物和化物层的生长及其电化学特性
Song Hyeon Kim1, Young-Il Kim1
1Department of Chemistry, Yeungnam University, 280 Daehak-ro, Gyeongsan 38541, Republic of Korea.
Materials (Basel, Switzerland)
|January 25, 2025
概括
通过在空气,和氨流中进行受控加热,对片的表面修改产生不同的氧化和化相. TiO2衍生化表现出优越的电容,最佳样本达到66.2 F/cm2.
科学领域:
- 材料科学 材料科学 材料科学
- 表面化学 表面化学
- 电化学 电化学 电化学
背景情况:
- 对于先进的材料应用, (Ti) 薄膜表面的修改至关重要.
- 了解不同大气条件下的相变化是控制材料性质的关键.
研究的目的:
- 通过热处理在空气,N2和NH3流中研究薄膜的表面修饰.
- 描述由此产生的氧化和化相及其微观结构.
- 评估合成材料的电化学特性,特别是电容.
主要方法:
- 在受控大气层中加热片:空气, (N2) 流和氨 (NH3) 流在不同的温度下.
- 表面变化的相位分析 (例如,Ti3O,TiO2,Ti2N,TiN的形成).
- 化层的微结构特征,注意孔隙性.
- 电化学测试以确定面积特异电容.
主要成果:
- 在空气或N2中加热会在高温下产生氧化 (Ti3O,TiO2).
- 在NH3流中的氨解产生化相 (Ti2N,TiN),在更高的温度下,TiN占主导地位.
- 顺序处理 (空气然后NH3) 产生TiO2衍生的TiN.
- 与直接衍生的TiN相比,TiO2衍生的TiN显示出明显更高的电容.
- 优化的TiN在0.034 mA/cm2时实现了66.2 F/cm2的面积特异电容.
结论:
- 在不同的气体流中进行受控的热处理有效地改变了薄膜表面,产生了不同的氧化物和化物相.
- TiN形成的方法显著影响其微观结构和电化学性能.
- TiO2衍生的TiN提供了优越的电容,突出了其在电化学储能应用中的潜力.
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