对温度依赖的定时动因子在辅助金属氧化物半导体单光子雪崩探测器结构设计中的分析
Jau-Yang Wu1, Yu-Wei Lu2, Meng-Hsuan Liu2
1Department of Electrical Engineering, Yuan Ze University, Taoyuan 32003, Taiwan.
Sensors (Basel, Switzerland)
|January 25, 2025
概括
设备结构显著影响单光子雪崩光二极管 (SPAD) 在不同温度的动. 修改后的电场减少了温度依赖的动,这对于LiDAR和量子应用至关重要.
科学领域:
- 光子学和光电学和光电子学.
- 半导体设备物理 半导体设备物理
背景情况:
- 单光子雪崩光二极管 (SPAD) 对于LiDAR和量子应用至关重要,因为其高灵敏度和定时分辨率.
- SPAD jitter的温度依赖性对性能至关重要,但研究不足.
研究的目的:
- 分析SPAD动特征和温度依赖性.
- 调查设备结构对动的影响.
- 评估使用TSMC 18HV和13HV工艺制造的SPAD.
主要方法:
- 使用皮秒激光器 (405nm至905nm) 来测试SPAD.
- 在0°C至60°C的温度范围内检查的动.
- 分析了扩散载体类型及其对动值的影响.
主要成果:
- 带有低电场的SPAD显示出明显的温度依赖的动.
- 这种变化与温度依赖的扩散常量有关,并配有两个时间常量.
- 带有修改电场的SPAD表现出较弱的温度依赖性和较小的动.
结论:
- 设备结构极大地影响了SPAD jitter的温度灵敏度.
- 优化的电场设计最大限度地减少了温度依赖的动,提高了要求高的应用程序的SPAD可靠性.
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