相关实验视频

Updated: Dec 21, 2025

Author Spotlight: Introduction to Active Probe Atomic Force Microscopy with Quattro-Parallel Cantilever Arrays

Author Spotlight: Introduction to Active Probe Atomic Force Microscopy with Quattro-Parallel Cantilever Arrays

Published on: June 13, 2023

超精确的多轴CARIC控制策略,适用于纳米精度的空气轴承运动阶段

Ran Zhou¹, Ze Wang¹, Jiuru Lu¹

¹State Key Laboratory of Tribology in Advanced Equipment, Department of Mechanical Engineering, Tsinghua University, Beijing, 100084, China; Beijing Key Laboratory of Transformative High-end Manufacturing Equipment and Technology, Tsinghua University, Beijing, 100084, China.

ISA transactions

|January 27, 2025

概括

一种名为CARIC (轮自适应实时代补偿) 的新自适应控制方法在多轴制造中实现了超高精度. 它显著提高了复杂的轮任务的准确性和适应性.

科学领域:

制造业工程制造工程
控制系统控制系统
机械电子学是什么意思机械电子学

背景情况:

超精密制造要求严格的性能,需要先进的运动控制多轴轮.
现有的方法经常与轨迹概括,干扰拒绝和参数适应同时扎.

研究的目的:

为了引入一种新的轮自适应实时代补偿 (CARIC) 方法.
为了实现极端的多轴轮精度,轨迹概括,干扰排斥和参数适应.

主要方法:

卡里克集成了强大的反,自适应的前和在线轨迹补偿.
一个在线错误预测模型可以对补偿信号进行代计算,以主动地抑制错误.
控制行动稳定系统,适应变化,并预测/纠正未来的错误.

主要成果:

卡里克实现了与代学习控制 (ILC) 相似的准确性,增强了概括和适应.
实验表明,在一个纳米精度的空气轴承阶段,一致的7纳米级精度.
该方法在各种轮,有效载荷和干扰中被证明是有效的.

结论:

卡里克为超精密制造业的运动控制提供了重大进步.
该方法能够主动抑制错误,从而提高整体系统性能.
卡里克拥有提高先进运动控制系统性能的潜力.

关键词:

轮错误预测轮错误预测多轴轮控制器多轴轮控制器参数适应参数适应实时代补偿 (RIC) 是一种实时代补偿.超精确的运动系统.

更多相关视频

Fabricating van der Waals Heterostructures with Precise Rotational Alignment

Fabricating van der Waals Heterostructures with Precise Rotational Alignment

Published on: July 5, 2019

Measurement of Extracellular Ion Fluxes Using the Ion-selective Self-referencing Microelectrode Technique

Measurement of Extracellular Ion Fluxes Using the Ion-selective Self-referencing Microelectrode Technique

Published on: May 3, 2015

相关概念视频

One-Degree-of-Freedom System

One-Degree-of-Freedom System

In mechanical engineering, one-degree-of-freedom systems form the basis of a wide range of electrical and mechanical components. Using these models, engineers can predict the behavior of various parts in a larger system, which gives them insight into how different forces interact with each other.
A one-degree-of-freedom system is defined by an independent variable that determines its state and behavior. One example of a one-degree-of-freedom system is a simple harmonic oscillator, such as a...

Atomic Force Microscopy

Atomic Force Microscopy

Atomic force microscopy (AFM) is a type of scanning probe microscopy that can analyze topographic details of various specimens like ceramics, glass, polymers, and biological samples. AFM offers over 1000 times more resolution than the optical imaging system. Images generated from AFM are three-dimensional surface profiles, offering an advantage over the flat, two-dimensional images from other imaging techniques.
The AFM Probe
The probe is regarded as the heart of any AFM setup and comprises the...