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纳米制造担心在SEM中进行的测量第五部分:处理噪声

Michael T Postek¹, András E Vladár¹

¹National Institute of Standards and Technology Gaithersburg, MD 20899 USA.

Proceedings of SPIE--the International Society for Optical Engineering

|January 28, 2025

概括

扫描电子显微镜 (SEM) 产生噪音图像,限制数据质量. 本文探讨了噪声源和信号对噪声比 (SNR) 对SEM维度计量精度的影响.

科学领域:

材料科学材料科学材料科学
计量学计量学计量学
显微镜的使用方法

背景情况:

扫描电子显微镜 (SEM) 对材料的表征和制造至关重要.
在SEM中图像噪声限制了微镜可以获得的细节和信息.
由于近光电流和快速成像模式,噪音信号很常见.

研究的目的:

讨论扫描粒子束仪器中测量不确定性的原因.
具体解决信号噪声比 (SNR) 和其对测量不准确性的影响.
为改善SEM应用中的数据质量提供见解.

主要方法:

在SEM成像中分析噪音源.
在测量数据中的信号噪声比 (SNR) 的评估.
在维度计量学背景下审查降噪策略.

主要成果:

在SEM显微镜中,噪声显著降低了样本特定细节.
低初级电子束电流和快速成像加剧了信号噪声.
了解噪音和SNR对于准确的SEM测量至关重要.

结论:

噪音是SEM中测量不确定性的主要原因之一.
优化SNR对于精确的维度计量学至关重要.
有效的噪音管理提高了SEM数据的可靠性.

关键词:

这就是SEM SEM.校准校准的时间降低噪音的方法测量测量测量测量的测量计量学计量学计量学计量学建模建模模型建模模型噪音噪音噪音噪音噪音管理噪音管理扫描电子显微镜扫描电子显微镜

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