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使用基于机器视觉的针孔点衍射干扰仪测试了镜子精度调整系统.

Jiasheng Lu, Bing Li, Zhuo Zhao

    Journal of the Optical Society of America. A, Optics, image science, and vision
    |January 28, 2025
    PubMed
    概括

    本研究引入了用于针孔点衍射干扰仪 (PPDI) 的自动调整系统. 基于机器视觉的系统精确地纠正倾斜和失焦错误,增强干扰图的获取.

    科学领域:

    • 光学工程的光学工程.
    • 计量学 计量学 计量学
    • 干涉测量是干涉测量的方法.

    背景情况:

    • 针孔点衍射干扰仪 (PPDI) 中精确的干扰图取决于精确的对齐.
    • 目前用于倾斜误差的手动调整方法很麻烦,失焦误差仍然无法纠正,阻碍了PPDI仪器仪表.

    研究的目的:

    • 为PPDI中测试的镜子开发一个自动调整系统.
    • 为了克服手动对齐的局限性,并纠正倾斜和失焦错误.

    主要方法:

    • 利用衍射理论来数学分析测试镜子反射束和PPDI针孔之间的错位错误.
    • 设计了一种机器视觉系统,包括CCD摄像头,变焦镜头和3DOF步进电机调节框架.
    • 实现图像处理算法和步进电机控制程序以实现精确的对齐.

    主要成果:

    • 开发的系统有效地控制了倾斜误差.
    • 成功纠正了失焦错误,简化了干扰图的获取.
    • 在PPDI的测试镜面对齐中证明了理想的精度和效率.

    结论:

    • 拟议的基于机器视觉的对齐系统显著改善了PPDI的仪器仪表过程.

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  • 这种自动化的方法为获得准确的干扰图提供了更高的精度和方便.