在正常发射下高效的三孔光束分割器
概括
这项研究介绍了一种新型的化三端口格子,具有增强的衍射效率 (DE) 和带宽. 制造的格子在多个订单和广泛的波长范围内显示出高DE.
科学领域:
- 光学和光子学 在光学和光子学.
- 纳米制造和石版印刷技术
- 衍射光学是不同的光学.
背景情况:
- 三端口网格是光束分裂和操纵的关键光学元件.
- 提高衍射效率 (DE) 和运行带宽仍然是网格设计中的一个关键挑战.
研究的目的:
- 设计和制造一个化三端口格子,具有卓越的衍射效率和带宽.
- 用简化模式方法 (SMM) 提供格衍射的物理解释.
- 使用严格的合波分析 (RCWA) 来优化格子参数.
主要方法:
- 使用简化模式方法 (SMM) 和严格的合波分析 (RCWA) 设计和模拟.
- 使用扫描光束干扰光刻法 (SBIL) 制造170μm x 170μm格子.
- 对632.8nm和波长范围内的衍射特性进行实验研究.
主要成果:
- 在632.8 nm时实现了29% (+1 顺序),30% (0 顺序) 和31% (-1 顺序) 的平均衍射效率.
- 在波长范围613nm至653nm内的所有顺序中,已证明测量的DE超过25%.
- 与传统设计相比,制造的格子展示了更好的DE和带宽.
结论:
- 开发的化三端口格在衍射效率和运行带宽方面提供了增强的性能.
- SMM,RCWA和SBIL的组合为制造高性能衍射光学元件提供了一个有效的途径.
- 这种格子技术有潜力用于需要高效和宽带光束操纵的应用.
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