概括
本研究介绍了一种反射相显微镜系统,可以改善深度范围和视野,以便进行精确的检查. 双波长方法实现了7.7微米的深度范围和11x11毫米2的视野,精度为1.30纳米.
科学领域:
- 光学计量学 在光学计量学
- 显微镜技术 显微镜技术
背景情况:
- 反射相位显微镜为高分辨率表面造型提供了潜力.
- 现有的系统在工业应用中面临深度范围和视野的限制.
研究的目的:
- 开发使用反射相显微镜的增强检查系统.
- 改进深度范围和视野 (FOV) 进行精确的计量.
主要方法:
- 实施双波长方法以增加深度范围.
- 利用干扰图的连续积累来减轻相放大.
- 采用错误纠正算法以提高图像质量.
- 应用图像拼接技术来实现广的视野.
主要成果:
- 达到最大预期深度范围为7.7微米.
- 获得了大约11 × 11mm2的视野.
- 在测量中证明了1.30nm的精度.
- 在晶片上成功检查了孔结构.
结论:
- 开发的反射相显微镜系统显著提高了深度范围和FOV.
- 该系统为广泛区域的检查提供了高精度.
- 这项技术具有高分辨率,大规模工业应用的潜力.
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