概括
本研究介绍了一种数值方法,用于纠正高面比 (HAR) 样品的连贯扫描干涉测量 (CSI) 中的偏差. 这种新技术可以改善表面地形测量,而不会改变光学系统.
科学领域:
- 光学计量学 在光学计量学
- 纳米技术 纳米技术
- 表面科学是一门学科.
背景情况:
- 连贯扫描干涉测量 (CSI) 是一种用于测量表面地形的非破坏性技术.
- 由于侧墙堵塞,传统的CSI在高比例 (HAR) 样本上扎,阻止了底部地形检索.
- 对于HAR样本的现有CSI修改通常会增加系统的复杂性和成本.
研究的目的:
- 提出一个数值方法来纠正HAR样本中CSI中的样本诱导偏差.
- 为了提高信号噪声比,减少干扰边缘在CSI测量中的扩大.
- 为了实现准确的微观结构地形构造,而无需对光学系统进行修改.
主要方法:
- 开发了一种数值校正方法,用于影响偏差的干扰信号.
- 偏差调制点传播函数 (PSF) 通过严格的数值电磁场解决方案和角光谱法 (ASM) 计算.
- 从实验数据中提取了初始的HAR沟尺寸,以匹配计算的3D-PSF进行偏差校正.
主要成果:
- 拟议的方法成功地纠正了HAR样本中CSI中的样本诱导偏差.
- 使用纠正的干扰信号重建了HAR沟的精确微观结构地形.
- 在HAR沟样本 (100-300微米深,10-30微米宽) 上进行实验验证,证明了该方法的有效性.
结论:
- 数值校正方法为HAR样本的CSI中异常问题提供了成本效益和不那么复杂的解决方案.
- 这种方法显著提高了对具有挑战性的微观结构的表面地形测量的准确性和可靠性.
- 经过验证的方法有可能在微型制造和半导体检测中得到先进的应用.
相关概念视频
Atomic Absorption Spectroscopy: Interference
645
Interference leads to systematic error in atomic absorption (AA) measurements by enhancing or diminishing the analytical signal or the background. These interferences can be grouped into three main categories: spectral interference, chemical interference, and physical interference.
Spectral interference occurs when signals from other elements or molecules overlap with the analyte signal, falsely elevating or masking the analyte's absorbance. This interference can be corrected using Zeeman,...
Spectral interference occurs when signals from other elements or molecules overlap with the analyte signal, falsely elevating or masking the analyte's absorbance. This interference can be corrected using Zeeman,...
645
NMR Spectrometers: Resolution and Error Correction
652
When magnetic nuclei in a sample achieve resonance and undergo relaxation, the signal detected in NMR is an approximately exponential free induction decay. Fourier transform of an exponential decay yields a Lorentzian peak in the frequency domain. Lorentzian peaks in an NMR spectrum are defined by their amplitude, full width at half maximum, and position, where the peak width is governed by the spin-spin relaxation time alone. In real experiments, however, the applied magnetic field is rendered...
652


