不相干的光干扰仪用于反射表面的单射,双波长,面积拓测量
Optics express
|January 29, 2025
概括
这项研究提出了一种新的干扰仪,用于快速,两波长的表面测量. 它允许精确的定量相位成像和扩展测量范围用于表面纹理分析.
科学领域:
- 光学计量学 在光学计量学
- 表面科学是一门学科.
- 干涉测量是干涉测量的方法.
背景情况:
- 定量相成像 (QPI) 对于表面表征至关重要.
- 传统的干扰仪通常具有有限的测量范围或需要扫描.
- 同时进行多波长测量可以克服诸如相模两可的局限性.
研究的目的:
- 引入一种新型干扰仪,用于两波长的单次射击面积定量相位成像.
- 为了使精确的表面纹理测量使用低连贯源在反射几何学.
- 使用合成波长技术扩大明确的测量范围.
主要方法:
- 该系统使用两个相同的4f成像系统用于参考和样本手臂.
- 参考臂中的二光镜和衍射格产生了两个分散的轴外参考束.
- 来自两个波长的干扰被捕获在一个单一的中,用于合成波长计算.
主要成果:
- 干扰仪成功地在757nm和841nm进行了一次性区域定量相位成像.
- 获得了3.79μm的理论明确测量范围.
- 对1微米深的槽进行的实验测量显示,它与接触式笔型材有很好的一致性.
结论:
- 开发的干扰仪适用于快速,高分辨率的表面纹理测量.
- 合成波长技术有效地扩大了明确的测量范围.
- 需要进一步优化以减少噪音和提高信号质量以提高准确性.
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