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Updated: Jul 26, 2026

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深度学习驱动的晶片缺陷细分和分类

Rohan Ingle1, Aniket K Shahade1, Mayur Gaikwad1

  • 1Symbiosis Institute of Technology, Pune Campus, Symbiosis International (Deemed University), Pune, Maharashtra, India.

MethodsX
|January 29, 2025
PubMed
概括

使用深度学习对晶片的自动缺陷检测显著提高了集成电路的质量. 这项研究实现了精确的缺陷细分和分类,简化了制造过程.

关键词:
深度学习是一种深度学习.缺陷细分 缺陷细分 缺陷细分图像细分 图像细分 图像细分集成电路 集成电路 集成电路质量管理质量管理.晶片是一种晶片.使用深度学习进行晶圆缺陷细分和分类.晶圆缺陷 晶圆缺陷 晶圆缺陷

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