设计,建模和控制具有高精度和长冲程的同轴集成宏微复合执行器
Caofeng Yu1,2, Qilong Zhang1, Yijun Wei1
1School of Mechatronics Engineering, Anhui University of Science and Technology, Huainan 232001, China.
The Review of scientific instruments
|January 30, 2025
概括
这项研究介绍了一种新的同轴集成宏微复合执行器. 这种先进的执行器以纳米准确度实现了精确的定位,证明了它在高分辨率应用中的潜力.
科学领域:
- 机械工程 机械工程
- 机器人技术 机器人技术 机器人技术
- 材料科学 材料科学 材料科学
背景情况:
- 传统的执行器在实现大排量和高精度方面经常面临局限性.
- 整合宏观和微观执行阶段为增强定位能力提供了潜在的解决方案.
研究的目的:
- 设计和开发一个同轴集成的宏微复合执行器.
- 为了建模,控制和实验验证复合执行器的性能.
主要方法:
- 一个宏型执行器 (语音线圈电机) 和一个微型执行器 (巨型磁阻执行器) 被同轴集成.
- 对于两个执行器,建立了动力模型.
- 宏观驱动器使用自动排斥干扰控制器,微型驱动器使用模糊滑动模式控制器.
主要成果:
- 大型执行器在1公斤负载下显示了10毫米级的定位误差为9微米,30毫米级的定位误差为11微米.
- 微型执行器实现了0.15μm的最小位移分辨率,并且可以在不超越的情况下执行1μm的步骤.
- 复合执行器在350nm范围内实现了最终定位精度.
结论:
- 开发的同轴集成宏微复合执行器有效地将大排量与高精度定位相结合.
- 实施的控制策略确保了宏观和微观执行阶段的稳健性能.
- 实验结果验证了执行器对于要求纳米级定位任务的能力.
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