半导体中的绿色材料:来自IRDS超越CMOS路线图的观点
Akiko Ueda1, Hiroyuki Akinaga2, Sapan Agarwal3
1Research Center for Emerging Computing Technologies, National Institute of Advanced Industrial Science and Technology (AIST), Tsukuba, Ibaraki, Japan.
Nanotechnology
|January 30, 2025
概括
环境,安全,健康和可持续性 (ESHS) 在半导体制造中至关重要. 这项研究探讨了这一点.
科学领域:
- 半导体制造业 半导体制造业
- 材料科学是一种材料科学.
- 可持续的工程是可持续的工程.
背景情况:
- 环境,安全,健康和可持续性 (ESHS) 在半导体行业越来越重要.
- "国际设备和系统路线图"强调了可持续半导体制造的"绿色材料".
- 新兴架构和设备为ESHS带来了新的挑战和机遇.
研究的目的:
- 从"绿色材料"的角度讨论新兴半导体架构和设备的当前趋势.
- 强调"绿色材料"对于可持续半导体制造的重要性.
- 突出比较和标准化在推进可持续实践中的作用.
主要方法:
- "超越CMOS"概念的文献综述和设备和系统的国际路线图.
- 分析新兴半导体架构和设备的当前趋势.
- 讨论对比测试和标准化的重要性.
主要成果:
- 确定新兴半导体技术中的关键"绿色材料"趋势.
- 强调未来半导体制造业需要可持续实践.
- 承认标准化指标对于评估材料可持续性的重要性.
结论:
- "绿色材料"对于实现半导体行业的可持续性至关重要.
- 基准测试和标准化对于推动采用可持续实践至关重要.
- "绿色材料"的持续研究和开发对于半导体制造业的未来至关重要.
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