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Updated: May 29, 2025

Array Tomography Workflow for the Targeted Acquisition of Volume Information using Scanning Electron Microscopy
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评估扫描电子显微镜用于测量小规模地形

Vimanyu Chadha1, Nathaniel C Miller1, Ruikang Ding1

  • 1Department of Mechanical Engineering and Materials Science, University of Pittsburgh, Pittsburgh, PA 15261.

Surface topography : metrology and properties
|February 3, 2025
PubMed
概括

扫描电子显微镜 (SEM) 提供了一种简单的方法来测量小规模的表面地形,其性能优于100 nm以下的原子力显微镜 (AFM). 这种技术可以在广泛的尺度上提高表面性能预测.

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