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使用屈曲振动对声学悬浮板的振荡性能进行数值调查
Yuanyuan Liu1, Xiaodong Sun2, Zilong Zhao3
1School of Electrical Engineering and Automation, Anhui University, Hefei 230601, China.
Ultrasonics
|February 6, 2025
概括
近场声学悬浮 (NFAL) 准确地预测了使用新模型的物体振荡. 这种进步增强了NFALAL.
科学领域:
- 声学 声学 在声学方面
- 机械工程 机械工程
- 材料科学 材料科学 材料科学
背景情况:
- 近场声学悬浮 (NFAL) 为制造微妙元件提供了优势.
- 物体振荡是NFAL中固有的挑战,因为高频振动.
- 在柔性散热器下预测振荡性能对于扩展NFAL应用至关重要.
研究的目的:
- 在NFAL中开发悬浮物体振荡位移的预测模型.
- 分析各种参数对悬浮精度的影响.
主要方法:
- 使用有限差异方法解决了压缩膜压力和厚度的控制方程.
- 通过无限小的扰动方法计算压缩膜刚度和阻尼系数.
- 使用转移函数方法开发了一个振荡位移预测模型.
主要成果:
- 数字结果与实验测量结果有很好的一致性.
- 增加反射器重量提高了悬浮精度.
- 在测试范围内,辐射器振动幅度和空气温度对悬浮精度的影响有限.
结论:
- 开发的模型准确地预测了NFAL系统中的对象振荡.
- 通过调整反射器重量,可以优化NFAL悬浮精度.
- 该研究扩大了NFAL在精密制造中的适用性.
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