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Updated: May 28, 2025

Ohmic Contact Fabrication Using a Focused-ion Beam Technique and Electrical Characterization for Layer Semiconductor Nanostructures
08:12

Ohmic Contact Fabrication Using a Focused-ion Beam Technique and Electrical Characterization for Layer Semiconductor Nanostructures

Published on: December 5, 2015

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展示NiCo作为用于Post-Cu互连连接的替代金属

Ju Young Sung1, Gi-Young Jo2, Sang Mo Moon1

  • 1Department of Energy Systems Research and Department of Physics, Ajou University, Gyeonggi-do 16499, Republic of Korea.

ACS nano
|February 12, 2025
PubMed
概括

单相六角密封- (NiCo) 合金薄膜表现出降低电阻尺寸效应,性能优于8nm以下的铜互连. 这一突破使得微电子中的高级高密度集成成为可能.

关键词:
医疗保健工作人员的医疗保健工作人员.尼科尼科尼科是什么金属薄膜薄膜的金属薄膜电阻性 电阻性 电阻性效果的大小效果大小效果

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