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基于芯片上螺旋共振腔的维尼尔效应增强温度传感

Changhao Liu¹, Ziwen Pan², Yi Yang²

¹Concord College, Acton Burnell Hall, Acton Burnell, Shrewsbury, Shropshire SY5 7PF, UK.

Sensors (Basel, Switzerland)

|February 13, 2025

概括

一个新的螺旋共振腔增强了芯片上传感器的光学维尼尔效应. 这种设计提高了1419x的灵敏度,用于广泛的温度传感应用.

科学领域:

光子学和光学传感器
集成光学集成光学集成光学
纳米技术纳米技术

背景情况:

光学维尼尔效应提高了光学传感器的灵敏度和分辨率.
芯片上的波导共振腔面临着空洞长度和自由光谱范围的限制.
现有的维尼尔效应检测系统在很长的信封周期中扎.

研究的目的:

提出一种新的芯片上的波导结构,以优化级维尼尔效应的检测范围.
为了克服芯片上的共振腔中的空间限制.
提高光学传感技术的灵敏度和范围.

主要方法:

设计了一个螺旋共振腔,以在有限的区域内延长有效的腔长.
在芯片上的光学波导共振腔中利用了耳语画廊模式.
连接了两个长度相似的共振腔,以利用维尼尔效应.

主要成果:

螺旋腔的长度达到7.50米,大大增加了有效的腔长.
封面自由的光谱宽度减少到371.29 MHz,使检测更容易.
与单个共振腔相比,温度传感显示灵敏度增加了14.19倍.

结论:

拟议的螺旋共振腔结构有效地优化了级联维尼尔效应的检测范围.
这种方法显著提高了芯片内光学传感器的灵敏度.
该研究为开发广泛,高灵敏度的维尼尔传感技术提供了新的途径.

关键词:

维尼尔效应是维尼尔的影响.温度传感器是一种温度传感器.低声画廊模式 (WGM) 的共振腔

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