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Updated: May 28, 2025

Real-Time DC-dynamic Biasing Method for Switching Time Improvement in Severely Underdamped Fringing-field Electrostatic MEMS Actuators
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对MEMS电容式麦克风结构设计变化的分析

Tzu-Huan Peng1, Huei-Ju Hsu2, Jin H Huang3

  • 1Ph.D. Program of Mechanical and Aeronautical Engineering, Feng Chia University, Taichung 407102, Taiwan.

Sensors (Basel, Switzerland)
|February 13, 2025
PubMed
概括

微电机系统 (MEMS) 麦克风中的微结构设计会影响声学性能. 肋骨增强后板提高了MEMS麦克风的可靠性,而悬浮的隔膜提高了信号噪声比 (SNR).

关键词:
声学过载点 (AOP) 是指声学过载点.电容式麦克风是一个电容式麦克风.压缩空气测试 (CAT) 压缩空气测试相当于电路建模的同等电路建模微电机系统 (MEMS) 是一种微电机系统.灵敏度 灵敏度 灵敏度 灵敏度 灵敏度信号与噪声比 (SNR) 是指信号与噪声的比率.

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